■ Chemical & DI-Water Process Application
: for Wafer or Glass Process Operation

• Batch Type Wet-Station - Conventional, Shrink Bath
  
• Single Type Wet-Station - Post CMP Cleaner, Cleaner, Etcher
  
• Next Generation Wet-Station - Shrink Bath Wet-Station
  
• Order made Wet-Bench - Clean Bench / Fume Hood etc.

■ Dry process Application
: for Wafer or Glass Process Operation

• IPA Enhanced Type Dryer - STG Dryer, Vapor Dryer
  
• Mechanical Type Dryer - N2(Air) Dryer, N2(Air) Knife Dryer

2) Sub Process System Line-Up

■ System Sustain Application
: for Mass-Production Fab or R&D Lab

• Cleaner - Sonic Cleaner, Parts Cleaner, Tube Cleaner
  
• Gas Scrubber - Wet Scrubber, Dry Scrubber, Burn & Wet Scrubber

■ Utility Application

• CCSS
  
• Chemical Mix and Supply Unit
  
• Hot DI-Water Generator
  
• DI-Water Supply Unit

■ Other SUS and PVC Product