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제품소개



    Batch Type Wet-Station       Single Type Wet-Station
  Batch Type Wet-Station
(Conventional Wet-Station)
 
  Single Type Wet-Station
(Post CMP Cleaner, Cleaner, Etcher)
 
    Next Generation Wet-Station       Order made Wet-Bench
  Next Generation Wet-Station
(Shrink Bath Wet-Station )
 
  Order made Wet-Bench
(Clean Bench / Fume Hood)
 
    IPA Enhanced Type Dryer       Cleaner
  IPA Enhanced Type Dryer
(STG Dryer, Vapor Dryer )
 
  Cleaner
(Sonic Cleaner, Parts Cleaner, Tube Cleaner )
 
    Gas Scrubber    
  Gas Scrubber
(Wet Scrubber, Dry Scrubber, Burn & Wet Scrubber)
   
 
 
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